TY  - BOOK
AU  - IEEE International symposium on semiconductor manufacturing (4:1992:San Francisco)
TI  - Semiconductor manufacturing. Proceedings
SN  - 0780306813
U1  - 621.38152 
PY  - 1992///
CY  - New York
PB  - IEEE
KW  - Semiconductors - Manufacturing; IEEE Components, packaging and manufacturing society
ER  -