Semiconductor manufacturing. Proceedings   

 - New York  IEEE  1992 
 - ix, 146p  incl. bibl. 
<br/><br/><label>ISBN: </label>0780306813 
<br/><br/><label>Subjects--Index Terms: </label>Semiconductors - Manufacturing; IEEE Components, packaging and manufacturing society 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / N924 "SER"