Microlithography  Science and technology 
ed by James R Sheats and Bruce W. Smith. 
 - New York  Marcell Dekker  1998 
 - xii, 780p. 
<br/><br/><label>ISBN: </label>0824799534 
<br/><br/><label>Dewey Class. No.: </label>621.381531  / N981