IEEE International symposium on semiconductor manufacturing (13  2002  Boston) <br/><br/>
Advancing the science of semiconductor manufacturing excellence. Proceedings   

 - Piscataway  IEEE  2002 
 - 430p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780371585 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P025 "SER"