IEEE International conference on micro electro mechanical systems(15  2002  Las Vegas) <br/><br/>
Micro electro mechanical systems  Technical Digest 

 - Piscataway  IEEE  2002 
 - xliii, 737p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780371852 
<br/><br/><label>Dewey Class. No.: </label>621.381  / P02 "SER"