Handbook of thin film deposition processes and techniques  principles, methods equipment and applications 
ed by Krishna Seshan 
 - 2nd ed. 
 - William Andrew Publishing  Noyes Publications  2002 
 - xxviii, 629p. 
 - Materials science and processing technology series .
<br/><br/><label>ISBN: </label>0815514425 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P022