TY  - BOOK
AU  - Topical confrence on radio frequency power in plasmas (14
AU  - Mau, Tak Kuen, ed.
AU  - DeGrassie, John, ed.
TI  - Radio frequency power in plasmas. AIP Conf Proc: Vol.595
T2  - AIP Confernce proceedings. Vol. 595
SN  - 0735400385
U1  - 530.44 
PY  - 2001///
CY  - Melville
PB  - American Institute of Physics
ER  -