Topical confrence on radio frequency power in plasmas (14 2001 Oxnard, California)
Radio frequency power in plasmas. AIP Conf Proc Vol.595
ed by Tak Kuen Mau, John DeGrassie
- Melville American Institute of Physics 2001
- xvi, 544p. incl. bibl.
- AIP Confernce proceedings. Vol. 595 .