Thin films. Vol.27  Ionized physical vapor deposition 
ed. by. Jeffrey A. Hopwood 
 - San Diego  Academic press  2001 
 - xii, 253p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0125330278 
<br/><br/><label>Dewey Class. No.: </label>530.4105  / N63.27 "SER"