International conference on microelectronic test structures (14  2001  Kobe) <br/><br/>
Microelectronic test structures. ICMTS 2001. Proceedings   

 - Piscataway  IEEE  2001 
 - x, 271p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780365119 
<br/><br/><label>Dewey Class. No.: </label>621.381548  / P011 "SER"