TY  - BOOK
AU  - IEEE International conference on microelectronic test structures (5: 1992: San Diego)
TI  - Microelectronics test structures. ICMTS 1992: Proceedings
SN  - 0780305361
U1  - 621.381548 
PY  - 1992///
CY  - New York
PB  - IEEE
KW  - ICMTS 1992; Microelectronics; IEEE Electron Devices Society
ER  -