International Conference on Ion Implantation  Equipment and Techniques( Berchtesgaden ,1982) <br/><br/>
Ion implantation techniques   
ed.by H. Ryssell, H. Glawischniq 
 - Berlin  Springer-Verlag  1982 
 - xii, 372p. 
 - Springer series in electrophysics  V.10 .
<br/><br/><label>ISBN: </label>3540118780 
<br/><br/><label>Dewey Class. No.: </label>537.622  / N825