TY  - BOOK
AU  - Internationl conference on characterization and metrology for ULSI technology (2000
AU  - Seiler, David G., ed. et al
TI  - Characterization and metrology for ULSI technology 2000. Vol.550 (CD-ROM included)
T2  - AIP Conference proceedings. Vol. 550
SN  - 156396967X
U1  - 621.38152 
PY  - 2001///
CY  - Melville
PB  - American Institute of Physics
ER  -