Internationl conference on characterization and metrology for ULSI technology (2000  Gaithersburg) <br/><br/>
Characterization and metrology for ULSI technology 2000. Vol.550 (CD-ROM included)   
ed. by David G. Seiler et al 
 - Melville  American Institute of Physics  2001 
 - xv, 708p.  incl. bibl. 
 - AIP Conference proceedings. Vol. 550 .
<br/><br/><label>ISBN: </label>156396967X 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / P01