Thin films  V.22:modeling of film deposition for microelectronic applications 
ed. by Stephen Rossnagel 
 - San Diego  Academic Press  1996 
 - xiv, 291p. 
<br/><br/><label>ISBN: </label>0125330227 
<br/><br/><label>Dewey Class. No.: </label>530.4106  / N63.21 "SER"