TY  - BOOK
AU  - Nonogaki, Saburo.
AU  - Veno, Takumi.
AU  - Ito, Toshio.
TI  - Microlithography fundamentals in semiconductor devices and fabrication technology
SN  - 0824799518
U1  - 621.38152 
PY  - 1998///
CY  - New York
PB  - Marcel Dekker
ER  -