Nonogaki, Saburo. <br/><br/>
Microlithography fundamentals in semiconductor devices and fabrication technology   
by Saburo Nonogaki, Takumi Veno, Toshio Ito 
 - New York  Marcel Dekker  1998 
 - v, 327p. 
<br/><br/><label>ISBN: </label>0824799518 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / N984;1