TY  - BOOK
AU  - Gardner, Julian W
AU  - Varadan, Vijay K
AU  - Awadelkarim, Osama O
TI  - Microsensors, MEMS and smart devices
SN  - 047186109X
U1  - 621.381 
PY  - 2005///
CY  - New York
PB  - Wiley
ER  -