TY  - BOOK
AU  - Bai, Radha T S.
AU  - Advised by Gopal, E S R.
TI  - Study of the source-substrate geometry to achieve thickness uniformity of thin films
U1  - 530.41 
PY  - 1987///
CY  - Bangalore
PB  - Indian Institute of Science
KW  - Source substrate geometry
KW  - Thin films
KW  - Uniformity
N1  - Includes references; MSc(Eng);1987;Instrumentation and Services Unit
ER  -