TY  - BOOK
AU  - Lindroos, Veikko
AU  - Tilli, Markku
AU  - Letho, Ari
AU  - Motooka, Teruaki
TI  - Hand Book of silicon based mems materials and technologies
SN  - 9780815515944
U1  - 621.381 
PY  - 2010///
CY  - Amsterdam
PB  - Elsevier
ER  -