Lindroos, Veikko <br/><br/>
Hand Book of silicon based mems materials and technologies   
by Veikko Lindroos, et al 
 - Amsterdam  Elsevier  2010 
 - xxxii, 636p. 
<br/><br/><label>ISBN: </label>9780815515944 
<br/><br/><label>Dewey Class. No.: </label>621.381  / P101 'R'