Dennis, Ervin A. et. al. <br/><br/>
Lithographic technology  In transition 
by Ervin A Dennis et. al. 
 - Albany  Delmar Pub.  1997 
 - xi, 626p. 
<br/><br/><label>ISBN: </label>0827361246 
<br/><br/><label>Dewey Class. No.: </label>686.2315  / N97 (CPDM)