TY  - BOOK
AU  - International Workshop on Stress induced phenomena in mettallization (5
AU  - Kraft, Oliver, ed.
TI  - Stress induced phenomena in metallization. Proceedings/ed. by Oliver Kraft (...)
T2  - American Institute of Physics. Conference Proceedings.491
SN  - 1563969041
U1  - 667.9 
PY  - 1999///
CY  - Melville
PB  - AIP
ER  -