TY  - BOOK
AU  - Topical conference on radio frequency power in plasmas (12
TI  - Radio frequency power in plasmas: Proceedings /ed. by Philip M Ryanm Thomas Intrator
T2  - American Institute of Physics. Conference Proceedings. 403
SN  - 156396709X
U1  - 530.44 
PY  - 1997///
CY  - Woodbury
PB  - AIP
ER  -