Workshop on micro electro mechanical systems(11  1998  Heidelberg) <br/><br/>
MEMS 98  Proceedings 

 - Piscataway  IEEE  1998 
 - xxx, 666p.  incl. bibl. 
<br/><br/><label>ISBN: </label>0780344138 
<br/><br/><label>Dewey Class. No.: </label>621.381  / N981 "SER"