Workshop on micro electro mechanical systems(10  1997  Nagoya) <br/><br/>
MEMS-97  Proceedings 

 - Piscataway  IEEE  1997 
 - xxiv, 545p.  incl. bibl. 
<br/><br/><label>ISBN: </label>078033745X 
<br/><br/><label>Dewey Class. No.: </label>621.381  / N974 "SER"