TY  - BOOK
AU  - Powel, Ronald A.
AU  - Rossnagel, Stephen M.
TI  - Thin films; V.26: PVD for microelectronics:Sputter deposition applied to semiconductor manufacturing
SN  - 012533026X
U1  - 530.4105 
PY  - 1999///
CY  - San Diego
PB  - Academic Press
ER  -