Powel, Ronald A. <br/><br/>
Thin films; V.26  PVD for microelectronics:Sputter deposition applied to semiconductor manufacturing 
by Ronald A. Powel, Stephen M. Rossnagel 
 - San Diego  Academic Press  1999 
 - xiii, 419p.  incl. bibl. 
<br/><br/><label>ISBN: </label>012533026X 
<br/><br/><label>Dewey Class. No.: </label>530.4105  / N63.26 "SER"