TY  - BOOK
AU  - Rao, P.B.V. Nookeshwara.
TI  - Development of rotating target ion beam sputtering system for deposition of multicomponent thin films
T2  - I.I.Sc., Dept. of ISU., M.Sc(Engg)., Thesis
U1  - 621.38152 
PY  - 1998///
CY  - Bangalore
PB  - IISc
ER  -