Rao, P.B.V. Nookeshwara. <br/><br/>
Development of rotating target ion beam sputtering system for deposition of multicomponent thin films   
by P B V Nookeswara Rao 
 - Bangalore  IISc  1998 
 - 67p. 
 - I.I.Sc., Dept. of ISU., M.Sc(Engg)., Thesis .
<br/><br/><label>Dewey Class. No.: </label>621.38152  / N981 "THESIS"