Microlithography Science and technology ed by James R Sheats and Bruce W. Smith.
Material type: BookPublication details: New York Marcell Dekker 1998Description: xii, 780pISBN:- 0824799534
- 621.381531 N981
Item type | Current library | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|
Book | Physics | 621.381531 N981 (Browse shelf(Opens below)) | Available | 169714 |
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