Study of the source-substrate geometry to achieve thickness uniformity of thin films T.S. Radha Bai

By: Contributor(s): Material type: TextTextPublication details: Bangalore : Indian Institute of Science, 1987.Description: viii, 77 p. : illSubject(s): DDC classification:
  • 530.41 N87
Dissertation note: MSc(Eng);1987;Instrumentation and Services Unit.
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