Laser processing of thin films and microstructures (Record no. 9315)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 3540179518 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.366 |
| Item number | N876 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Boyd, Ian W. |
| 245 ## - TITLE STATEMENT | |
| Title | Laser processing of thin films and microstructures |
| Remainder of title | oxidation, deposition and etching of insulators |
| Statement of responsibility, etc. | by Ian W.Boyd |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Berlin |
| Name of publisher, distributor, etc. | Springer-Verlag |
| Date of publication, distribution, etc. | 1987 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | viii, 320p. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Springer series in material science |
| Volume/sequential designation | V.3 |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Lasers - Industrial applications |
| 919 ## - | |
| -- | 009477 |
| 964 ## - | |
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| -- | 0 |
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