Chemical vapor deposition of refractory metals and ceramics (Record no. 66929)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 1558990569 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 620.16 |
| Item number | N90 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Symposium on the Chemical Vapor Deposition of Refractory Metals and Ceramics (1989 |
| Numeration | Boston) |
| 245 ## - TITLE STATEMENT | |
| Title | Chemical vapor deposition of refractory metals and ceramics |
| Remainder of title | |
| Statement of responsibility, etc. | ed. by Theodore M. Besmann, Bernard M. Gallois |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Pittsburgh |
| Name of publisher, distributor, etc. | Materials Research Society |
| Date of publication, distribution, etc. | 1990 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiii, 399p. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Materials research society symposia proceedings |
| -- | V.168. |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Refractory coating; Vapor- plating |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Besmann, Theodore M., ed. Gallois, Bernard M., ed. |
| 919 ## - | |
| -- | 069303 |
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