1996 advanced semiconductor Manufacturing Conference and workshop (Record no. 432842)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00586nam a22001697a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 241126b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0780333489 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 51 |
| Item number | IEE |
| 245 ## - TITLE STATEMENT | |
| Title | 1996 advanced semiconductor Manufacturing Conference and workshop |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Cambridge |
| Name of publisher, distributor, etc | IEEE Service CENTER |
| Date of publication, distribution, etc | 1996 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | iv, 479p.: |
| Other physical details | ill.: |
| Dimensions | 28 cm |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Include reference |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Computer integrated manufacturing |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Oparations management system for continues flow manufacturing |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | APC in the semiconductor industry |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Item type | Gifted books |
No items available.
