Glow dischange process (Record no. 424979)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00371nam a2200157Ia 4500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 537.52 |
| Item number | N80 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Brain, Chapman |
| 245 ## - TITLE STATEMENT | |
| Title | Glow dischange process |
| Remainder of title | sputtering and plasma etching |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Wiley |
| Date of publication, distribution, etc. | 1980 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | |
| 500 ## - GENERAL NOTE | |
| General note | |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Sputtering (Physics); Glow discharges |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | |
| 964 ## - | |
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