Semiconductor measurement technology (Record no. 21347)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152028 |
| Item number | N761 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Sawyer, David E. Berning, David W. |
| 245 ## - TITLE STATEMENT | |
| Title | Semiconductor measurement technology |
| Remainder of title | Laser scanning of active semiconductor devices-videotape script /by David E. Sawyer and David W. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Washington |
| Name of publisher, distributor, etc. | NBS |
| Date of publication, distribution, etc. | 1976 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | iii, 21p. |
| 490 ## - SERIES STATEMENT | |
| Series statement | National Bureau of Standards Special Publication |
| Volume/sequential designation | 400-27 |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Semiconductors - Testing; Optical Scanners; Lasers |
| 919 ## - | |
| -- | 022298 |
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