MEMS Packaging (Record no. 180908)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780863413353 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| Item number | P047 (CeNSE) |
| 245 ## - TITLE STATEMENT | |
| Title | MEMS Packaging |
| Remainder of title | |
| Statement of responsibility, etc. | ed by Tai-Ran Hsu |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | London |
| Name of publisher, distributor, etc. | INSPEC |
| Date of publication, distribution, etc. | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxix, 275p. |
| 490 ## - SERIES STATEMENT | |
| Series statement | EMS Processing Series |
| -- | 3 |
| Volume/sequential designation | EMIS Data reviews series |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Microelectromechanical Systems; Microelectronic Packaging; |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Hsu, Tai-Ran., ed |
| 919 ## - | |
| -- | 193528 |
| 964 ## - | |
| -- | |
| -- | |
| -- | |
| -- | |
| -- | |
| -- | |
| -- | CENSE |
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