Low-pressure mocvd of oxide dielectrics (Record no. 143325)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | P039'THESIS' |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Singh, Mangala Prasad |
| 245 ## - TITLE STATEMENT | |
| Title | Low-pressure mocvd of oxide dielectrics |
| Remainder of title | a study of their growth, microstructure, and properties |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bangalore |
| Name of publisher, distributor, etc. | IISc |
| Date of publication, distribution, etc. | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | vi,192p. |
| 490 ## - SERIES STATEMENT | |
| Series statement | IISc, Dept of MRC, PhD Thesis |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Dielectrics; Thinfilms; Chemical vapour deposition |
| 919 ## - | |
| -- | 148734 |
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