Analysis of squeeze film damping in microdevices (Record no. 142277)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | P036 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Pandey, Ashok Kumar |
| 245 ## - TITLE STATEMENT | |
| Title | Analysis of squeeze film damping in microdevices |
| Remainder of title | |
| Statement of responsibility, etc. | by Ashoka Kumar Pandey |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bangalore |
| Name of publisher, distributor, etc. | Indian Institute of Science |
| Date of publication, distribution, etc. | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | viii,95p. |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | MEMS Device; Micro device; Micro electromechanical system device; Squeeze film dumping; |
| 919 ## - | |
| -- | 147668 |
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