Advancing the science of semiconductor manufacturing excellence. Proceedings (Record no. 134617)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0780371585 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | P025 "SER" |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | IEEE International symposium on semiconductor manufacturing (13 |
| Numeration | 2002 |
| -- | Boston) |
| 245 ## - TITLE STATEMENT | |
| Title | Advancing the science of semiconductor manufacturing excellence. Proceedings |
| Remainder of title | |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Piscataway |
| Name of publisher, distributor, etc. | IEEE |
| Date of publication, distribution, etc. | 2002 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 430p. |
| Other physical details | incl. bibl. |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | ASMC 2002; Semiconductor devices; Semiconducting materials; Semiconductor - Manufacturing; IEEE Components, packaging and manufacturing society; |
| 919 ## - | |
| -- | 139894 |
| 904 ## - LOCAL DATA ELEMENT D, LDD (RLIN) | |
| a | Advanced semiconductor manufacturing conference: Proceedings |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| JRD Tata Memorial Library | JRD Tata Memorial Library | 11/07/2002 | 621.38152 P025 "SER" | 169049 | S |
