Radio frequency power in plasmas. AIP Conf Proc (Record no. 132659)
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000 -LEADER | |
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fixed length control field | 00604nam a2200193Ia 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0735400385 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 530.44 |
Item number | P012 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Topical confrence on radio frequency power in plasmas (14 |
Numeration | 2001 |
-- | Oxnard, California) |
245 ## - TITLE STATEMENT | |
Title | Radio frequency power in plasmas. AIP Conf Proc |
Remainder of title | Vol.595 |
Statement of responsibility, etc. | ed by Tak Kuen Mau, John DeGrassie |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Melville |
Name of publisher, distributor, etc. | American Institute of Physics |
Date of publication, distribution, etc. | 2001 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xvi, 544p. |
Other physical details | incl. bibl. |
490 ## - SERIES STATEMENT | |
Series statement | AIP Confernce proceedings. Vol. 595 |
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
Topical term or geographic name as entry element | Plasma physics - Radio frequency; American Instiute of Physics |
700 ## - ADDED ENTRY--PERSONAL NAME | |
Personal name | Mau, Tak Kuen, ed. |
700 ## - ADDED ENTRY--PERSONAL NAME | |
Personal name | DeGrassie, John, ed. |
919 ## - | |
-- | 137878 |
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