Microelectronic test structures. ICMTS 2001. Proceedings (Record no. 131602)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0780365119 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381548 |
| Item number | P011 "SER" |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | International conference on microelectronic test structures (14 |
| Numeration | 2001 |
| -- | Kobe) |
| 245 ## - TITLE STATEMENT | |
| Title | Microelectronic test structures. ICMTS 2001. Proceedings |
| Remainder of title | |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Piscataway |
| Name of publisher, distributor, etc. | IEEE |
| Date of publication, distribution, etc. | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | x, 271p. |
| Other physical details | incl. bibl. |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | ICMTS 2001; Microelectronics; IEEE Electron devices society |
| 919 ## - | |
| -- | 136813 |
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