Microelectronic test structure. ICMTS 1989. Proceedings. (Record no. 13153)
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fixed length control field | 00604nam a2200193Ia 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0879427140 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.381548 |
Item number | N891 "SER" |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | IEEE International conference on microelectronic test structures (1989 |
Numeration | Edinburgh) |
245 ## - TITLE STATEMENT | |
Title | Microelectronic test structure. ICMTS 1989. Proceedings. |
Remainder of title | |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | New York |
Name of publisher, distributor, etc. | IEEE |
Date of publication, distribution, etc. | 1989 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xii, 265p. |
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
Topical term or geographic name as entry element | Microelectronics; ICMTS 1989; IEEE Electron Devices Society |
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