Microelectronic test structure. ICMTS 1989. Proceedings. (Record no. 13153)

MARC details
000 -LEADER
fixed length control field 00604nam a2200193Ia 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0879427140
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381548
Item number N891 "SER"
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name IEEE International conference on microelectronic test structures (1989
Numeration Edinburgh)
245 ## - TITLE STATEMENT
Title Microelectronic test structure. ICMTS 1989. Proceedings.
Remainder of title
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New York
Name of publisher, distributor, etc. IEEE
Date of publication, distribution, etc. 1989
300 ## - PHYSICAL DESCRIPTION
Extent xii, 265p.
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN)
Topical term or geographic name as entry element Microelectronics; ICMTS 1989; IEEE Electron Devices Society
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