Stress induced phenomena in metallization. Proceedings/ed. by Oliver Kraft (...) (Record no. 125586)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 1563969041 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 667.9 |
| Item number | N99 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | International Workshop on Stress induced phenomena in mettallization (5 |
| Numeration | 1999 |
| -- | Stuttgart) |
| 245 ## - TITLE STATEMENT | |
| Title | Stress induced phenomena in metallization. Proceedings/ed. by Oliver Kraft (...) |
| Remainder of title | |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Melville |
| Name of publisher, distributor, etc. | AIP |
| Date of publication, distribution, etc. | 1999 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix, 318p. |
| Dimensions | incl. bibl. |
| 490 ## - SERIES STATEMENT | |
| Series statement | American Institute of Physics. Conference Proceedings.491 |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | Stress induced phenomena in mettallization; Metal working; Interconnects, reliability; Electromigration, fundamentals; Microstructure and thermal stress |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kraft, Oliver, ed. |
| 919 ## - | |
| -- | 130462 |
No items available.
