MEMS 98 (Record no. 124003)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0780344138 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| Item number | N981 "SER" |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Workshop on micro electro mechanical systems(11 |
| Numeration | 1998 |
| -- | Heidelberg) |
| 245 ## - TITLE STATEMENT | |
| Title | MEMS 98 |
| Remainder of title | Proceedings |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Piscataway |
| Name of publisher, distributor, etc. | IEEE |
| Date of publication, distribution, etc. | 1998 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxx, 666p. |
| Dimensions | incl. bibl. |
| 690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) | |
| Topical term or geographic name as entry element | MEMS 98; Microelectronics; Investigation of micro structures, sensors, actuators, machines and systems; Millimeter-scale systems-analysis, design, fabrication, operation and application |
| 919 ## - | |
| -- | 128824 |
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