Semiconductor manufacturing. Proceedings (Record no. 11996)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00604nam a2200193Ia 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0780307410 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | N925 "SER" |
| 245 ## - TITLE STATEMENT | |
| Title | Semiconductor manufacturing. Proceedings |
| Remainder of title | |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York |
| Name of publisher, distributor, etc. | IEEE |
| Date of publication, distribution, etc. | 1992 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 232p |
| Dimensions | incl. bibl. |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | ASMC 1992; Semiconductors - Manufacturing; IEEE Components, packaging and manufacturing society; Semiconductor equipment and materials international. |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | IEEE International symposium on semiconductor manufacturing (3:1992: Cambridge) |
| 919 ## - | |
| -- | 012196 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| JRD Tata Memorial Library | JRD Tata Memorial Library | 24/05/1996 | 621.38152 N925 "SER" | 152480 | Reference |
