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Process engineering analysis in semiconductor device fabrication /Stanley Middleman, Arthur K. Hochberg

Middleman, Stanley.

Process engineering analysis in semiconductor device fabrication /Stanley Middleman, Arthur K. Hochberg - New York MGH 1993 - xvii, 774p - McGraw-Hill Chemical Engineering series .

ISBN: 0070418535

Dewey Class. No.: 621.38152 / N93;1

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