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Process engineering analysis in semiconductor device fabrications /Stanley Middleman, Arthur K. Hochberg.

Middleman, Stanley.

Process engineering analysis in semiconductor device fabrications /Stanley Middleman, Arthur K. Hochberg. - New York MGH 1993 - xviii, 774p. - McGraw-Hill Chemical Engineering series .

ISBN: 0070418535

Dewey Class. No.: 621.38152 / N93

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