Radio frequency power in plasmas: Proceedings/ed. by Ronald Prater, Vincent S Chan.
Radio frequency power in plasmas: Proceedings/ed. by Ronald Prater, Vincent S Chan.
- New York AIP 1996
- xiii, 502p. incl.bibl.
- American Institute of physics. Conference proceedings. 355 .
1563965364
530.44 / N96
1563965364
530.44 / N96